| 摘要 |
A substrate attaching device ( 100 ) includes a first electrostatic chuck ( 30 ), a second electrostatic chuck ( 40 ) set below the first electrostatic chuck, and a controller ( 45 ). The controller alternately changes the polarity of a voltage applied on the second electrostatic chuck so as to eliminate static electricity on attached substrates ( 36, 46 ). Operation of the substrate attaching device does not carry micro-particles to the substrates. A method for attaching two substrates together using the substrate attaching device comprises: holding a first one of the substrates and a second one of the substrates to the first electrostatic chuck and the second electrostatic chuck, respectively; moving the first electrostatic chuck and the second electrostatic chuck closer together until the first substrate and the second substrate are attached together; and changing the polarity of a voltage applied on one of the first electrostatic chuck and the second electrostatic chuck alternately.
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