| 摘要 |
PROBLEM TO BE SOLVED: To provide support body peeling method and device for increasing productivity in a process in which a support body is peeled from a workpiece. SOLUTION: One of four adhesive rolls 23 is positioned at a peeling carrying-out position J, the support body 43 of the workpiece 40 is continuously pressed on an outer peripheral face 24 of the adhesive roll 23 while conveying the workpiece 40 in X direction in the drawing by directing a corner part 40K of a plate face of the workpiece 40 to the peeling carrying-out position J by a positioning part 50 to let it adhere on and peel it from the adhesive roll 23 from the support body 43 positioned in the corner part 40K of the workpiece 40, and the support body 43 is wound around the adhesive roll 23 to peel all the support bodies 43 from the workpiece 40. Then, the support body is peeled from a following workpiece 40 by a following adhesive roll 23 by an adhesive roll rotary transfer part 30, the support body 43 is removed from the adhesive roll 23 which finishes peeling by a support body removing part 65, and the adhesvie roll 23 from which the support body 43 is removed is cleaned in a cleaning part 70. COPYRIGHT: (C)2005,JPO&NCIPI
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