| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device whose device performance can easily be enhanced by separately optimizing a forming region of a surface acoustic wave exciting means or a surface acoustic wave detection means such as an IDT and a forming region of a surface acoustic wave reflecting means such as a reflector. SOLUTION: The surface acoustic wave device 100 provided with: a piezoelectric body thin film 103 formed on a substrate; a surface acoustic wave exciting means 104 including exciting electrodes 104a, 104b or a surface acoustic wave detection means 104 including detection electrodes formed on the surface of the piezoelectric body thin film 103; and a surface acoustic wave reflecting means 105 including the reflecting electrode 105a formed on the surface is characterized in that the thickness t1 of the information body thin film in the forming region of the surface acoustic wave exciting means or the surface acoustic wave detection means is different from the thickness t2 of the piezoelectric body thin film in the forming region of the surface acoustic wave reflection means. COPYRIGHT: (C)2005,JPO&NCIPI
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