| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of microfabrication products which can comparatively easily manufacture the microfabricated products of a metal, mainly such as copper. SOLUTION: A method of manufacturing microfabricated products, by injecting the mixture of a fluid and a powder solid with air to workpiece, comprises a process (a) of forming a pattern on workpiece by the photosensitive resist which does not have wet blasting resistance preferably; a process (b) of forming a blast resist layer, in portions other than the pattern formed of photosensitive resist; and a process (c) of processing of the wet blasting, by injecting the mixture of a fluid and a powder solid into workpiece. Microfabrication products are manufactured (d) with this manufacturing method which includes at least the above processes. COPYRIGHT: (C)2005,JPO&NCIPI
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