| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromechanical type optical shutter element having large freedom in design and a simple structure, manufactured at a low cost, easily controlled and independent of wavelength. SOLUTION: The electromechanical type optical switch element is composed by providing: a fixed electrode erected vertically on a transparent substrate; a movable electrode which is supported facing to the fixed electrode with a gap on the supporting substrate; and a light shielding film which shields light advancing vertically to the supporting substrate on the movable electrode. The electromechanical type optical switch element having a large stroke is obtained by using the two electromechanical type optical switches. COPYRIGHT: (C)2005,JPO&NCIPI
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