发明名称 Configurable prober for TFT LCD array test
摘要 An improved prober for an electronic devices test system is provided. The prober is "configurable," meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, "x" and "y" axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
申请公布号 US2005179452(A1) 申请公布日期 2005.08.18
申请号 US20040903216 申请日期 2004.07.30
申请人 APPLIED MATERIALS, INC. 发明人 BRUNNER MATTHIAS;KURITA SHINICHI;SCHMID RALF;ABBOUD FAYEZ E.;JOHNSTON BENJAMIN;BOCIAN PAUL;BEER EMANUEL
分类号 G01R31/302;G01R31/26;G01R31/305;G02F1/13;G09G3/00;H01L21/687;(IPC1-7):G01R31/305 主分类号 G01R31/302
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