| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sensor for vacuum without bulging a sensor case, capable of keeping a gap with a slit disk constant, and capable of preventing the degree of vacuum from being lowered even when arranged in vacuum. SOLUTION: In this magnetic sensor for the vacuum provided with a magnetoresistance effect element 2 and a permanent magnet 3 in the sensor case 1, and sealed with a resin 4, a sensor cover equipped with an exhaust pipe 42 for evacuation-exhausting air in an inside of the sensor to an atmosphere side to be faced to an opening part side of the sensor case 1 is attached to the sensor case 1 by a screw 45 via an O-ring 44, and a valve 53 for controlling pressure of the evacuation-exhausting is attached in a midway of a route of the exhaust pipe 42 with the atmosphere side connected to a vacuum pump (not shown in Fig.). COPYRIGHT: (C)2005,JPO&NCIPI
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