发明名称 |
Grating element for filtering wavelengths < 100 nm |
摘要 |
There is provided a grating apparatus for filtering wavelengths <=100 nm. The grating apparatus includes multiple individual grating elements having grating lines. The individual grating elements are positioned one behind another on a curved support surface in relation to a plane spanned by the grating apparatus in a direction of beans of a light bundle that is incident on the grating apparatus.
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申请公布号 |
US2005180013(A1) |
申请公布日期 |
2005.08.18 |
申请号 |
US20040945626 |
申请日期 |
2004.09.21 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
HEIDEMANN KLAUS;OSTERRIED KARLFRID |
分类号 |
G01J3/18;G02B5/18;G02B27/00;(IPC1-7):G01J3/18 |
主分类号 |
G01J3/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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