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发明名称
METHOD FOR CLEANING HARMFUL MATERIALS IN SEMICONDUCTOR WASTE GAS
摘要
申请公布号
KR20050081035(A)
申请公布日期
2005.08.18
申请号
KR20040009264
申请日期
2004.02.12
申请人
FENG WU NIANG
发明人
FENG WU NIANG
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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