| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate dust removal apparatus capable of sucking and removing approximately whole of dust scraped from a surface of the substrate by a rotating rotation brush roller. SOLUTION: The two rotation brush rollers 20 rotating toward reverse directions each other are press-contacted with a surface of a substrate 10 placed and conveyed on a conveyor directed toward a direction crossing the substrate 10. Then, the dust deposited on the surface of the substrate 10 is scraped off from the surface of the substrate by the rotating rotation brush roller 20, is floated between the two rotation brush roller 20 and is deposited on the two rotation brush roller 20. Then, the dust is sucked to the inner side of a dust removal means 90 while passing through a dust-collection port 92 of the dust removal means continuously covering an upper periphery of the two rotation brush roller 20 and is discharged. COPYRIGHT: (C)2005,JPO&NCIPI
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