发明名称 Method of fabricating passivation layer for organic devices
摘要 Provided is a method of fabricating a passivation layer for an organic device, including: forming the organic device on a substrate; and forming a passivation layer on the organic device. Here, forming the passivation layer on the organic device includes forming an inorganic thin film by thin film deposition using pulsed plasma.
申请公布号 US2005181535(A1) 申请公布日期 2005.08.18
申请号 US20050059854 申请日期 2005.02.16
申请人 YUN SUN J.;LIM JUNG W.;KO YOUNG W.;LEE JIN H. 发明人 YUN SUN J.;LIM JUNG W.;KO YOUNG W.;LEE JIN H.
分类号 H01L51/00;H01L51/30;H01L51/52;(IPC1-7):H01L21/00;H01L21/44;H01L51/40 主分类号 H01L51/00
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