| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit coating type applicator which can form a homogeneous coating film by preventing drying unevenness and shrink of liquid, or the like. <P>SOLUTION: This slit coating type applicator 10 is provided with a holding table 20 for holding a substrates 1 and a coating head 40 where a slit-shaped nozzle opening 41 through which liquid 3 is made to flow out is provided so as to face a coating surface 1a of an opposite side to a held surface 1b held by the holding table 20 for the substrate 1. By relatively moving the substrate 1 and the coating head 40 in a surface direction of the coating surface 1a, the liquid 3 is applied onto the coating surface 1a of the substrate 1. Further, a heating means 80 for heating the liquid 3 immediately after being applied to the substrates 1 while applying the liquid 3 onto the substrate 1 by the coating head 40 is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
