| 摘要 |
An electrostatic actuator includes a substrate upon which substantially U-shaped support beams are arranged such that a movable element is displaceable in the Y-axis direction. Then, the movable element is displaced from an initial position to a switching position by an electrostatic force between electrodes. When the movable element is at the initial position, the support beams are configured such that the arm portions of the support beams are not parallel to each other and, when the movable element is displaced by a large amount to the vicinity of the switching position, the arm portions are extended in the X-axis direction so as to be substantially parallel to each other. Thus, since the spring constant in the X-axis direction of the support beams is increased, transverse locational deviations when the movable element is displaced and short-circuiting by the deviations are prevented and, as a result, the movable element can be stably displaced by a large amount.
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