Method of manufacturing semiconductor device and method of manufacturing optical wave guide,申请号EP20010310826-传众专利搜索

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发明名称	Method of manufacturing semiconductor device and method of manufacturing optical wave guide
摘要
申请公布号	EP1225620(B1)	申请公布日期	2005.08.17
申请号	EP20010310826	申请日期	2001.12.21
申请人	FUJITSU QUANTUM DEVICES LIMITED	发明人	WATANABE, TAKAYUKI;ITO, HIROAKI;FUJII, TAKUYA
分类号	G02B6/13;H01L21/308;H01S5/10;H01S5/20;H01S5/227;H01S5/343;(IPC1-7):H01L21/00;H01L33/00;H01L21/306	主分类号	G02B6/13
代理机构		代理人
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