发明名称
摘要 <p>The product management system for sputtering targets is configured between a target manufacturer and target customers via a computer network. The customer and the manufacturer share the various information relating to the product management, such as hysteresis information of the backing plates, product information of the sputtering targets, use information of the sputtering targets, or the like with each other.</p>
申请公布号 JP3684501(B2) 申请公布日期 2005.08.17
申请号 JP20000349139 申请日期 2000.11.16
申请人 发明人
分类号 G05B19/418;C23C14/34;G06Q50/00;G06Q50/04;(IPC1-7):G06F17/60 主分类号 G05B19/418
代理机构 代理人
主权项
地址