发明名称 Bond layer for silicon based substrates
摘要 A bond layer (14) for a silicon based substrate (12) comprises a refractory oxide forming metal having a thickness of between about 0.1 to 10 micron. The refractory oxide forming metal comprise chromium, tantalum, niobium, silicon, platinum, hafnium, yttrium, aluminum, zirconium, titanium, rare earth metals, alkaline earth metals and mixtures thereof. <IMAGE>
申请公布号 EP1479658(A3) 申请公布日期 2005.08.17
申请号 EP20040253018 申请日期 2004.05.21
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 SUN, ELLEN Y.
分类号 C04B41/52;C04B41/89;C23C28/04;C23C30/00;F01D5/28;F02C7/00 主分类号 C04B41/52
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