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发明名称
Method for manufacturing a MOS transistor in semiconductor device
摘要
申请公布号
KR100508756(B1)
申请公布日期
2005.08.17
申请号
KR20030015315
申请日期
2003.03.12
申请人
发明人
分类号
H01L21/8238;H01L21/336;H01L21/8234;H01L21/8242;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/8238
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代理人
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