发明名称 STABILIZED ALUMINUM LAMINATE HAVING ALUMINUM AND STABILIZING LAYER LAMINATED THEREON
摘要 An aluminum stabilization stacked body (101) formed by stacking a stabilization layer (103) formed with a metal and having a thickness of 0.001-1 mu m with any of a sputtering method, a deposition method and an ion plating method on a whole surface of a thin film (102) having a surface formed with aluminum. <IMAGE>
申请公布号 EP1564311(A1) 申请公布日期 2005.08.17
申请号 EP20030748750 申请日期 2003.10.07
申请人 FCM CO., LTD. 发明人 MIURA, SHIGEKI
分类号 B32B15/01;C23C28/00;B32B15/00;B32B15/08;C23C14/16;C23C28/02;C23C30/00;C25D5/10;C25D5/30;C25D5/44;C25D5/50;C25D7/00;H01L21/28;H01L21/288;(IPC1-7):C23C28/00 主分类号 B32B15/01
代理机构 代理人
主权项
地址