发明名称 |
STABILIZED ALUMINUM LAMINATE HAVING ALUMINUM AND STABILIZING LAYER LAMINATED THEREON |
摘要 |
An aluminum stabilization stacked body (101) formed by stacking a stabilization layer (103) formed with a metal and having a thickness of 0.001-1 mu m with any of a sputtering method, a deposition method and an ion plating method on a whole surface of a thin film (102) having a surface formed with aluminum. <IMAGE> |
申请公布号 |
EP1564311(A1) |
申请公布日期 |
2005.08.17 |
申请号 |
EP20030748750 |
申请日期 |
2003.10.07 |
申请人 |
FCM CO., LTD. |
发明人 |
MIURA, SHIGEKI |
分类号 |
B32B15/01;C23C28/00;B32B15/00;B32B15/08;C23C14/16;C23C28/02;C23C30/00;C25D5/10;C25D5/30;C25D5/44;C25D5/50;C25D7/00;H01L21/28;H01L21/288;(IPC1-7):C23C28/00 |
主分类号 |
B32B15/01 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|