发明名称 Method of forming a fluid-channel device with covalently bound hard and soft structural components
摘要 A hybrid hard/soft microfluidic device (20) is assembled by covalently bonding hard and soft materials. The channels are formed in a polyimide material (30), which is to be sandwiched between an integrated circuit (11) and a glass cover (15). The glass covered is treated with an amino siloxane to form free amine groups. The polyimide is treated to form free carboxyl groups. The glass and polyimide are bonded through amidation. The remaining polyimide surface is treated with polyamines to form free amine groups, while silicon dioxide surfaces of the integrated surface are treated with isocyanate siloxane to form free isocyanate groups. The integrated circuit is then covalently bonded to the polyimide surface. The latter surface can be a thermoplastic coating that offers some compliance, more intimate contact, and more thorough bonding. <IMAGE>
申请公布号 EP1563906(A1) 申请公布日期 2005.08.17
申请号 EP20040250631 申请日期 2004.02.05
申请人 AGILENT TECHNOLOGIES, INC. 发明人 ROITMAN, DANIEL B.;ROBOTTI, KARLA M.;KILLEEN, KEVIN P.
分类号 B01J20/286;B01L3/00;(IPC1-7):B01L3/00 主分类号 B01J20/286
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