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发明名称
METHOD FOR FORMING A ISOLATION LAYER OF TRENCH TYPE
摘要
申请公布号
KR100508537(B1)
申请公布日期
2005.08.17
申请号
KR20030006985
申请日期
2003.02.04
申请人
发明人
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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