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发明名称
Heated pressure transducer assembly
摘要
申请公布号
EP1316785(B1)
申请公布日期
2005.08.17
申请号
EP20020079663
申请日期
1997.01.13
申请人
MKS INSTRUMENTS, INC.
发明人
PANDORF, ROBERT C.;DEMONE, ARCHIBALD J.;THOMAS, FRANK W.;BLANKENSHIP, STEVEN D.
分类号
G01L9/12;G01L7/00;G01L9/00;G01L19/00;G01L19/04;G01L19/14;(IPC1-7):G01L7/00
主分类号
G01L9/12
代理机构
代理人
主权项
地址
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