Method for manufacturing ceramic multilayer substrate and green composite laminate

摘要

To produce a green composite laminate 11 , a green multilayer collective substrate 13 containing low-temperature sinterable glass ceramic powder as a main ingredient is disposed between first and second shrinkage-restraining layers 14 a and 14 b containing alumina powder as a main ingredient. Grooves 16 are formed on one main surface 11 a of the green composite laminate 11 such as to pass through the first shrinkage-restraining layer 14 a and the green multilayer collective substrate 13 and reach the second shrinkage-restraining layer 14 b, but not to reach the other main surface 11 b of the green composite laminate 11 . The green composite laminate 11 provided with the grooves 16 is sintered under conditions where the low-temperature sinterable glass ceramic powder is sintered and the green first and second shrinkage-restraining layers 14 a and 14 b are removed to prepare a plurality of ceramic multilayer substrates. This manufacturing method offers ceramic multilayer substrates with a high dimensional accuracy and substantially prevents defective divisions when a multilayer collective substrate is split into a plurality of ceramic multilayer substrates.