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发明名称
SILICON-CONTAINING LAYER DEPOSITION WITH SILICON COMPOUNDS
摘要
申请公布号
EP1563529(A2)
申请公布日期
2005.08.17
申请号
EP20030809181
申请日期
2003.10.20
申请人
APPLIED MATERIALS, INC.
发明人
SINGH, KAUSHAL, K.;COMITA, PAUL, B.;SCUDDER, LANCE, A.;CARLSON, DAVID, K.
分类号
C01B33/04;C01B33/107;C07F7/08;C07F7/12;C23C16/24;C23C16/30;(IPC1-7):H01L21/00
主分类号
C01B33/04
代理机构
代理人
主权项
地址
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