发明名称
摘要 An apparatus and a method for drying washed objects being capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects, and preventing energy loss are provided. The apparatus for drying washed objects includes a drying tank having an opening on the upper portion thereof so that the washed objects can be placed or taken out from above, and a rinsing tank formed integrally with the drying tank, and is capable of being sealed hermetically by closing the openable and closable lid. The drying tank includes a mist-straightening vane for supplying organic solvent mist at normal temperatures to the washed objects, so that the washed objects are dried by organic solvent mist emitted from the mist-straightening vane.
申请公布号 JP3684356(B2) 申请公布日期 2005.08.17
申请号 JP20020058652 申请日期 2002.03.05
申请人 发明人
分类号 B08B3/08;B08B3/02;C23G3/00;F26B5/00;H01L21/00;H01L21/304;(IPC1-7):H01L21/304 主分类号 B08B3/08
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