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发明名称
Semiconductor device and formation method of trench in the semiconductor device
摘要
申请公布号
KR100508862(B1)
申请公布日期
2005.08.17
申请号
KR20030029944
申请日期
2003.05.12
申请人
发明人
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
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地址
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