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发明名称
制造半导体之装置
摘要
本发明揭示一种制造半导体装置,其可提高加热器之冷却速率及加热器温度分布之均匀性。本发明之制造半导体装置具有一用以热处理半导体晶圆之加热器及一用以冷却该加热器之冷却组块。该冷却组块至少具有一个通孔,用以插入一贯穿物件。该通孔或各通孔之内表面至该贯穿物件的距离至多为50mm。该冷却组块系配置成既可接触与用以放置该晶圆之该表面相反的该加热器表面,亦可与之分离。前述贯穿物件系一电流馈送电极,用以馈送电流至该加热器电路、温度测量构件或其类似。
申请公布号
TW200527935
申请公布日期
2005.08.16
申请号
TW093139213
申请日期
2004.12.16
申请人
住友电气工业股份有限公司
发明人
新间健司;仲田博彦;夏原益宏
分类号
H05B3/10
主分类号
H05B3/10
代理机构
代理人
陈长文
主权项
地址
日本
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