发明名称 Method and apparatus for single disc ultrasonic cleaning
摘要 At least one ultrasonic treating apparatus adapted for treating a single workpiece and comprised of a relatively small tank with a sidewall-mounted ultrasonic transducer is provided. The tank may be provided with a movable partition for adjustably partitioning the tank into two sub-chambers, the partition being comprised of a material which is partially reflective and partially transmissive of ultrasonic energy supplied to a liquid within the tank. A reflector is provided within the tank for reflecting the acoustic energy either back to the movable partition or to a material which acts as an absorber of acoustic energy. In the former instance, the acoustic energy can be locally concentrated at a specific spacing from the ultrasonic transducer. In the latter instance, the effectiveness of ultrasonic treatment of the single workpiece is enhanced by favoring formation of progressive waves and minimizing formation of stationary waves.
申请公布号 US6929014(B2) 申请公布日期 2005.08.16
申请号 US20030661512 申请日期 2003.09.15
申请人 SEAGATE TECHNOLOGY LLC 发明人 SHARMA AMBER;SHEFFIELD JOHN EDGAR
分类号 B08B3/12;G11B23/50;H01L21/00;(IPC1-7):B08B3/12 主分类号 B08B3/12
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