发明名称 |
Semiconductor device having a folded layer structure |
摘要 |
An upper reflecting layer in a main region, a first support region and a second support region is separated from an upper reflecting layer in the surrounding region by separating grooves. The first support region and the second support region are folded in a valley shape from a substrate at grooves, and the first support region, the second support region and the main region are folded in a mountain shape, and the upper reflecting layer in the main region faces parallel to the substrate with spacing.
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申请公布号 |
US6930376(B2) |
申请公布日期 |
2005.08.16 |
申请号 |
US20030361852 |
申请日期 |
2003.02.11 |
申请人 |
ATR ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL |
发明人 |
KUBOTA KAZUYOSHI;VACCARO PABLO O.;AIDA TAHITO |
分类号 |
G02B6/42;H01L29/06;H01L31/0328;(IPC1-7):H01L29/06 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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