发明名称 Optical element holding device for exposure apparatus
摘要 An optical element holding device includes a ring body for accommodating an optical element and a drive mechanism for driving the optical element. The ring body has an inner ring portion, which engages with a peripheral edge of the optical element, and an outer ring portion integral with the inner ring portion. The drive mechanism includes an actuator, a displacement increasing mechanism and a guide mechanism. The guide mechanism transfers displacement of the actuator to the inner ring and moves the inner ring axially.
申请公布号 US6930842(B2) 申请公布日期 2005.08.16
申请号 US20010823767 申请日期 2001.03.30
申请人 NIKON CORPORATION 发明人 SHIBAZAKI YUICHI
分类号 G02B7/00;G02B7/02;G02B13/24;G03F7/20;G03F7/207;H01L21/027;(IPC1-7):G02B7/00 主分类号 G02B7/00
代理机构 代理人
主权项
地址