发明名称 |
AN ELECTRON-BEAM EVAPORATOR |
摘要 |
An electron-beam evaporator for refractory and chemically active metals consists of electron-beam gun and crucible with water cooling for the evaporation of material. The insert-hearth of chemically inert material relive to evaporative material is disposed inside the crucible. The external surface of insert-hearth has a groove in the form of heat-insulating cavity, and on the external surface there is a groove in the form of hemisphere.
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申请公布号 |
UA8368(U) |
申请公布日期 |
2005.08.15 |
申请号 |
UA20040604697U |
申请日期 |
2004.06.15 |
申请人 |
"ELSYS", PRIVATE ENTERPRISE |
发明人 |
SAKALO MYKHAILO IVANOVYCH;ISAENKO VOLODYMYR MYKOLAIOVYCH |
分类号 |
C23C14/24;(IPC1-7):C23C14/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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