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发明名称
PHOTOMASK RECLAMATION METHOD
摘要
申请公布号
KR100509396(B1)
申请公布日期
2005.08.12
申请号
KR20050020687
申请日期
2005.03.11
申请人
GPM CO., LTD.;MATSUDA TSUTOMU
发明人
KIM, KYUNG SUB;MATSUDA TSUTOMU
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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