METHOD AND APPARATUS FOR IRRADIATING LASER BEAM, METHOD AND APPARATUS OF MICRO MACHINING, AND METHOD AND APPARATUS FOR FORMING THIN FILM

摘要

PROBLEM TO BE SOLVED: To efficiently perform separation at an atomic and molecular level and ionization (i.e. desorption ionization) at the atomic and molecular level, for example, on the surface of a solid.

SOLUTION: The value of an irradiation fluence, which is related to a femto-second laser beam in a low fluence region causing non-thermal ionization discharge on the surface of the solid by being irradiated thereon, is set within a low fluence range according to a required separation depth separated from the surface of the solid and the property of the surface of the solid. The femto-second laser beam is irradiated on the surface of the solid with the value of the irradiation fluence set as described above.

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