发明名称 FLOW RATE CONTROL SYSTEM
摘要 PROBLEM TO BE SOLVED: To easily control a flow rate even at an integrated piping part with relatively simple constitution. SOLUTION: A flow rate control system is equipped with at least one flow rate control valve 5 provided in a flow passage 4 of fluid, a motor 6 which is provided for each flow control valve 5 to drive the flow rate control valve 5, and a handy terminal 3 which is detachably connected to the motor 6 to remotely operate the motor 6. The handy terminal 3 is connected to the motor 6 when necessary, and operated to drive the flow rate control valve 5 by the motor 6 by manipulating the terminal 3, thereby controlling the flow rate of the fluid in the flow passage 4. The console panel 10 of the handy terminal 3 is provided with a memory for storing a specified password code. The console panel 10 is provided with a memory for storing the opening extent of the flow rate control valve 5 after the flow rate control. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005217270(A) 申请公布日期 2005.08.11
申请号 JP20040023449 申请日期 2004.01.30
申请人 CKD CORP 发明人 ITO TOMOHIRO;NABEI TATSUMI;KATO TAKASHI
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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