发明名称 SPOTTING DEVICE AND METHOD, AND CONTROL DEVICE OF SPOTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a spotting device, a spotting method, and a control device of the spotting device capable of performing spotting of a sample onto the accurate position on the surface of a base material regardless of an attitude of the base material on the XY-plane. SOLUTION: This spotting device 1 includes a spot pin 4, an XYZ-driving device 7 for driving the spot pin 4 along the XY-plane over the base material 91, and a control device 11 for controlling the XYZ-driving device 7. The control device 11 detects XY-coordinates of photosensors 20a, 20b, converts uv-coordinates of a spot position into XY-coordinates on the basis of the XY-coordinates of the photosensors 20a, 20b, operates the XYZ-driving device 7 so that the spot pin 4 is moved to the converted XY-coordinates of the spot position, and operates the XYZ-driving device 7 so that the spot pin 4 is lowered on the position. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005214733(A) 申请公布日期 2005.08.11
申请号 JP20040020174 申请日期 2004.01.28
申请人 CASIO COMPUT CO LTD 发明人 TATEISHI NAOFUMI
分类号 G01N33/53;C12M1/00;C12N15/09;G01N37/00;(IPC1-7):G01N37/00 主分类号 G01N33/53
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