Reflecting layer sequence with silicon top layer e.g. for multilayer mirrors, has an arrangement of several layer-pairs each containing scandium and silicon layer

摘要

A layer sequence for reflection of radiation at specified wavelengths has a periodic arrangement of several layer-pairs (5) each containing a scandium layer (3) and a silicon layer (2), in which the silicon layer has a thickness of d si. The layer sequence has a silicon top layer for whose thickness, d is 0.5 d si less than or equal to d less than or equal to d si. An independent claim is included for a method for manufacturing a layer sequence.