| 摘要 |
A decision algorithm of discriminating a defect type and/or a defect level is automatically produced in a short time. The accuracy of defect classification in terms of a defect type or a defect level is improved. More specifically, feature values of surface defects acquired in the past are represented as points in a feature space, constraint is set that when the feature space is mapped into a space by an assumed mapping function, a discriminant plane can be defined in the mapped space such that mapped feature values are linearly separable perfectly with respect to the discriminant plane, an objective function is defined as the distance between the discriminant plane and a point located closest to the discriminant plane, an optimal discriminant plane is determined by solving a quadratic programming problem such that the objective function is maximized under the constraint, the determined discriminant plane is employed as a discriminant function, a feature value of a surface defect whose type is unknown is substituted into the discriminant function, and it is determined, from the resultant value of the discriminant function, whether the surface defect whose type is unknown is of the particular surface type.
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