发明名称 A NOVEL PACKAGING METHOD FOR MICROSTRUCTURE AND SEMICONDUCTOR DEVICES
摘要 A novel method of packaging electronic devices (105) (e.g. any device that receives or transmits electronic signals) including microelectromechanical devices, semiconductor devices, light emitting devices, light modulating devices, and light detecting device has been provided herein. The electronic device (105) is placed between two substrates (102, 110), at least one of which has a cavity for holding the electronic device. The two substrates are then bonded and hermetically sealed with a sealing medium (106). The adhesion of the healing medium (106) to the substrates, especially when one of the two substrate is ceramic, can be improved by applying a metallization layer (104) to the surface of the substrate.
申请公布号 WO2004107829(A3) 申请公布日期 2005.08.11
申请号 WO2004US16421 申请日期 2004.05.24
申请人 REFLECTIVITY, INC.;TARN, TERRY 发明人 TARN, TERRY
分类号 B81B7/00;G02B26/08;H01L23/10 主分类号 B81B7/00
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