CONDENSER OPTIC WITH SACRIFICIAL REFLECTIVE SURFACE
摘要
Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.
申请公布号
WO2005073813(A2)
申请公布日期
2005.08.11
申请号
WO2005US00839
申请日期
2005.01.12
申请人
EUV LLC;TICHENOR, DANIEL, A.;KUBIAK, GLENN, D.;LEE, SANG, HUN
发明人
TICHENOR, DANIEL, A.;KUBIAK, GLENN, D.;LEE, SANG, HUN