| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that sagging owing to the weight of a glass substrate occurs in the case of using a long roller capable of treating a large-sized glass substrate and that there is no high-performance washing apparatus free from sagging in the transportation roller. SOLUTION: In the glass substrate washing apparatus having a transportation roller, a metal-based composite material is used for the transportation roller to make the member lightweight and highly tough and thus a high-performance washing apparatus can be provided. Further, a high-performance and more preferable washing apparatus is provided by using a transportation roller containing SiC as a reinforcing material, an Al alloy as a matrix, and having the content of the reinforcing material in 30-80% by volume in the entire body. COPYRIGHT: (C)2005,JPO&NCIPI
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