| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a light source device for inspection, capable of illuminating with high efficiency, without unevenness in color and brightness by a light produced by overlapping light beams of different wavelengths. <P>SOLUTION: To the light source device for inspecting radiating specified light signal to an object to be checked by combining the emission lights from a plurality of light sources, a polygonal column which is so formed that introduction light conducted by only inside is provided. The emission lights from a plurality of light sources are made incident on one bottom of the polygonal column, and the emission light from the other bottom of the polygonal column is irradiated to the object to be inspected. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
