| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for measuring the of dust in a component or a device in such a case that a clean degree is not shown or measured in the component or device used in a clean room or clean booth. SOLUTION: The system has a mechanism for forming a space having a high clean degree for measuring the occurrence of dust and shielded from the open air to keep a clean degree and a counter for measuring the numerical value of floating particles emitted from the component used or scheduled to be used in the clean room or clean booth. COPYRIGHT: (C)2005,JPO&NCIPI
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