发明名称 Pressure sensor and method for manufacturing pressure sensor
摘要 An inexpensive and simple pressure sensor having good static pressure characteristics is provided. In a pressure sensor including a base having a hole to which a pressure is applied and performing electrical and mechanical insulation, and a sensor having a diaphragm connected to the hole and a strain gauge for converting a strain occurring in the diaphragm to an electric signal, the sensor being mounted to the base, the base is formed with such a thickness that the strain at the time of applying a static pressure does not change.
申请公布号 US2005172723(A1) 申请公布日期 2005.08.11
申请号 US20040988506 申请日期 2004.11.16
申请人 YOKOGAWA ELECTRIC CORPORATION 发明人 KATO SATOSHI;SARUYA TOSHIYUKI
分类号 G01L9/00;G01L9/06;G01L19/06;H01L29/84;(IPC1-7):G01L9/00 主分类号 G01L9/00
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