| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polymer sheet manufacturing method which does not generate burr when a through-holes are formed. <P>SOLUTION: The polymer sheet manufacturing method for manufacturing the polymer sheet having a plurality of through-holes has a step (a) for exposing the resist film applied to a substrate through a mask having a predetermined pattern, a step (b) for forming a master by developing the exposed resist, a step (c) for injecting a polydimethylsiloxane (PDMS) prepolymer mixture liquid in the master, a step (d) for peeling the cured PDMS mold from the master, a step (e) for bonding the PDMS mold to a glass substrate, a step (f) for injecting the a PDMS prepolymer mixture solution in the PDMS mold/glass substrate joined body to cure the same and a step (g) for peeling the PDMS mold and a glass substrate from the PDMS mold glass substrate joined body to recover the formed PDMS sheet with through holes. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
