发明名称 ZINC OXIDE CRYSTAL GROWTH SUBSTRATE
摘要 A zinc oxide crystal growth substrate is disclosed. The zinc oxide crystal growth substrate includes a thin layer of single crystal zinc oxide deposited on an self supporting substrate surface by a chemical deposition process. The chemical deposition process is selected from RF sputtering, CVD (chemical vapor deposition), MOCVD (metal organic chemical vapor deposition), spin coating, electrophoresis, and hydrothermal growth processes. The self supporting substrate may be amorphous, polycrystalline, or crystalline. The thin layer of zinc oxide has a crystal lattice which permits the crystal growth of a crystal compatible with zinc oxide. The compatible crystal has a lattice parameter within about 5% of a corresponding lattice parameter of the zinc oxide.
申请公布号 WO2004104274(A3) 申请公布日期 2005.08.11
申请号 WO2004US15881 申请日期 2004.05.20
申请人 BURGENER, ROBERT, H., II;FELIX, ROGER, L.;RENLUND, GARY, M. 发明人 BURGENER, ROBERT, H., II;FELIX, ROGER, L.;RENLUND, GARY, M.
分类号 B32B9/00;B32B9/04;B32B13/04;B32B19/00;C30B;C30B25/00;C30B29/16;H01L21/20;H01L21/363;H01L21/365;H01L21/368 主分类号 B32B9/00
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