发明名称 METHOD OF MANUFACTURING CRYSTAL BLANK
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal blank excellent in temperature characteristic and used for an electronic component such as a crystal vibrator. <P>SOLUTION: In the method of manufacturing a crystal blank for forming a plurality of crystal blanks from a crystal wafer by dicing processing, a step of irradiating the crystal wafer with a light or an X ray to measure a cut angle and performing offset a dicing blade to a Z' axis direction with respect to a traveling direction and offsetting an in-plane slewing angle at a proper value is provided before and after a step of sticking the crystal wafer on a dicing tape. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005217766(A) 申请公布日期 2005.08.11
申请号 JP20040021609 申请日期 2004.01.29
申请人 KYOCERA KINSEKI CORP 发明人 ITO AKIRA
分类号 H01L41/22;H01L41/18;H01L41/338;H03H3/02 主分类号 H01L41/22
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