摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal blank excellent in temperature characteristic and used for an electronic component such as a crystal vibrator. <P>SOLUTION: In the method of manufacturing a crystal blank for forming a plurality of crystal blanks from a crystal wafer by dicing processing, a step of irradiating the crystal wafer with a light or an X ray to measure a cut angle and performing offset a dicing blade to a Z' axis direction with respect to a traveling direction and offsetting an in-plane slewing angle at a proper value is provided before and after a step of sticking the crystal wafer on a dicing tape. <P>COPYRIGHT: (C)2005,JPO&NCIPI |