| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermocompression method of a green sheet capable of preventing the stretch of a ceramic green sheet and surely peeling it off from a carrier film without damaging or deforming it. SOLUTION: For the carrier film 12 holding the ceramic green sheet 2 in a rectangular shape on a lower surface, the ceramic green sheet 2 is thermocompressed to the upper surface of a body 11 to be laminated by pressurizing an upper punch 13 to the side of a lower punch 14. Thereafter, in the state of making a pair of chuck members 15 arranged adjacently along one side of the ceramic green sheet 2 among four chuck members 15 attached and fixed to the carrier film 12 near four corners of the ceramic green sheet 2 stand still, by moving the two remaining chuck members 15 to the side of the pair of the chuck members 15, the carrier film 12 is linearly peeled off from the ceramic green sheet 2 from the side where the two remaining chuck members 15 are attached. COPYRIGHT: (C)2005,JPO&NCIPI |
