VAPOR TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vapor treatment apparatus capable of being downsized without necessitating an immersion tank, or the like, and easily and sufficiently cleaning and treating minute articles without any problem in safety. SOLUTION: This vapor treatment apparatus has: an airtight tank; a solvent vapor condensing means arranged in the upper part of the airtight tank; a solvent vaporizing means arranged in the lower part of the airtight tank; a means for holding the article to be treated, which is arranged to be rotated freely between the solvent vapor condensing means and a solvent vaporizing means and through which a solvent vapor and a solvent can pass; and a driving mechanism for rotating the means for holding the article to be treated. COPYRIGHT: (C)2005,JPO&NCIPI