发明名称 |
Detecting pinholes in vertical cavity surface-emitting laser passivation |
摘要 |
A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.
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申请公布号 |
US2005175051(A1) |
申请公布日期 |
2005.08.11 |
申请号 |
US20050096397 |
申请日期 |
2005.03.31 |
申请人 |
DEBRABANDER GREGORY N.;HERRICK ROBERT W.;XIE SUNING;SLATER MATTHEW C. |
发明人 |
DEBRABANDER GREGORY N.;HERRICK ROBERT W.;XIE SUNING;SLATER MATTHEW C. |
分类号 |
H01S5/00;H01S5/183;(IPC1-7):H01S5/00 |
主分类号 |
H01S5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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