| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lapping machine capable of improving machining accuracy by suppressing vertical movement of a surface plate and thermal deformation of the surface plate and workpiece. <P>SOLUTION: This lapping machine 11 is provided with a table 15 rotatably supported on a base 13 and a hydrostatic bearing for imparting a vertical direction support to the table 15. A lower surface plate 17 is fixed to the table 15. A pressure fluid supply flow passage 53 for supplying pressure fluid to the hydrostatic bearing is provided within the table 15. A surface plate cooling flow passage 75 for cooling the lower surface plate 17 is provided within the lower surface plate 17 or the table 15. The pressure fluid supply flow passage 75 is communicated with the surface plate cooling flow passage 75 via a pressure reduction means 87. The pressure fluid having higher pressure than atmospheric pressure flowing in the pressure fluid supply flow passage 53 is reduced to pressure almost equal to atmospheric pressure to be supplied to the surface plate cooling flow passage 75. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
