| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element with enlarged mass in its central portion by making mask material patterned, modified into a projection curved-surface shape, and dry-etched. <P>SOLUTION: The mask material 12 applied to a work surface of a piezoelectric material 11 is made to reflow by contacting the vapor V of a solvent, and is modified into a projection-shaped mask 14 whose central portion is protruded upside by the surface tension of the mask material. The piezoelectric material 11 is then surface-worked by dry etching to have a three-dimensional shape 15 that copies the film-thickness distribution of the projection-shaped mask 14. By applying an oil-repelling treatment to the piezoelectric material with a surfactant 13 or the like, the reflow area of the mask material is limited, and the thickness distribution and the shape of the projection-shaped mask 14 can be controlled. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
